Surface-modifying method of metal silicide, manufacturing method and manufacturing equipment of silane trichloride using surface-modified metal silicide

Japanese Patent JP6293294

B2

A method for preparing trichlorosilane according to an embodiment of the present invention comprises the steps of: supplying surface-modified metal silicide and metal grade silicon to a reaction unit; supplying silicon tetrachloride and hydrogen to the reaction unit; and supplying a product, which is generated by a reaction of metal grade silicon, silicon tetrachloride , and hydrogen in the presence of metal silicide in the reaction unit, to a separation unit, and separating a trichlorosilane component. In cases where a silicon tetrachloride hydrochlorination reaction is performed using the method for preparing trichlorosilane according to the embodiment of the present invention, the yield of trichlorosilane can be raised.

WO/2005/123586	SILICIDE COMPOSITIONS CONTAINING ALKALI METALS AND METHODS OF MAKING THE SAME
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JP6762543	Thermoelectric material

Choi Won Chun
Park Young Ki
Lee Woo Hyun
Seo Phimin
Kang Na Young
Han Ju Hee
Lee Dong Ho
Anne Guillon
Kim Gil Ho

JP2016548272A

March 14, 2018

January 19, 2015

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KOREA GAS CORPORATION

C01B33/06; B01J23/72; B01J23/755; C01B33/107

JP10029813A
JP60103015A
JP7238039A
JP2013537162A

Samejima Mutsumi
New exemption victory
Fukumasa Mitsuru

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