The manufacturing method and manufacture system of a convex structure

Title:

The manufacturing method and manufacture system of a convex structure

Document Type and Number:

Japanese Patent JP6019953

Kind Code:

B2

Inventors:

Masashi Hirabayashi
Yuki Arizuka

Application Number:

JP2012193958A

Publication Date:

November 02, 2016

Filing Date:

September 04, 2012

Export Citation:

Assignee:

Dai Nippon Printing Co.,Ltd.

International Classes:

H01L21/027; B29C59/02

Domestic Patent References:

Foreign References:

US20100080951

Attorney, Agent or Firm:

Junzo Yoneda
Masataka Ota
Hideo Sarada

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