Title:
A manufacturing method of a mask for vapor deposition and a display
Document Type and Number:
Japanese Patent JP6160356
Kind Code:
B2
Abstract:
An evaporation mask includes: a mask body including a pattern region configured of a plurality of passage holes; and an adjusting frame configured to hold the mask body and having a mechanism capable of adjusting positions of the passage holes on the mask body. The adjusting frame has a frame-like base material, and a movable member that is provided along one or more sides of the base material to be bonded with an outer edge of the mask body, and at least a part of which is deformable on the base material. One or a plurality of slits are provided at a selective region of the movable member.
Inventors:
Kenta Kuriyama
Hirokazu Ishikawa
Tomohiro Kubo
Hirokazu Ishikawa
Tomohiro Kubo
Application Number:
JP2013168591A
Publication Date:
July 12, 2017
Filing Date:
August 14, 2013
Export Citation:
Assignee:
ソニー株式会社
International Classes:
C23C14/04; H01L51/50; H05B33/10
Domestic Patent References:
| JP2009064608A | ||||
| JP2005339858A | ||||
| JP2010135269A | ||||
| JP2016521316A | ||||
| JP2004269968A |
Foreign References:
| US20110146573 |
Attorney, Agent or Firm:
Patent Business Corporation Tsubasa International Patent Office
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