Title:
金属、金属の製造方法、金属の製造装置及びその用途
Document Type and Number:
Japanese Patent JPWO2007061012
Kind Code:
A
Inventors:
Yoshida Yoshiyuki
Ryusuke Iwasaki
Ikeda Shin-ichi
Naoki Shirakawa
Hiroshi Nishimura
Ryusuke Iwasaki
Ikeda Shin-ichi
Naoki Shirakawa
Hiroshi Nishimura
Application Number:
JP2006323359W
Publication Date:
May 31, 2007
Filing Date:
November 22, 2006
Export Citation:
Assignee:
Canon Macina Lee, Inc.
Independent administrative institution National Institute of Advanced Industrial Science and Technology
Independent administrative institution National Institute of Advanced Industrial Science and Technology
International Classes:
C23C14/14; C22B5/16; C23C14/24; C22B21/00; C22B15/00; C22B34/32; C22B34/12; C22B25/02; C22B19/04; C22B23/02
Attorney, Agent or Firm:
Kazuishi Furumiya