Title:
マイクロ可動デバイスおよびマイクロ可動デバイスの製造方法
Document Type and Number:
Japanese Patent JP5398411
Kind Code:
B2
Abstract:
A micro movable device according to an embodiment of the present invention may include a signal line formed on a support substrate, a ground line formed on the support substrate and arranged side by side with the signal line, a first driving electrode formed above the signal line, a second driving electrode formed above the ground line, a first auxiliary driving electrode arranged side by side with the first driving electrode, a second auxiliary driving electrode arranged side by side with the second driving electrode, and a movable electrode which is formed above the first driving electrode, the second driving electrode, the first auxiliary driving electrode and the second auxiliary driving electrode with a space therebetween, and which is supported on the support substrate.
Inventors:
Hiroaki Yamazaki
Application Number:
JP2009186039A
Publication Date:
January 29, 2014
Filing Date:
August 10, 2009
Export Citation:
Assignee:
Toshiba Corp.
International Classes:
B81B3/00; B81C1/00; H01H59/00
Attorney, Agent or Firm:
Hiroaki Sakai