Title:
A manufacturing method of an organic thin film element, a manufacture device of an organic thin film element, a formation method of organic membrane, and a manufacturing method of an organic EL device
Document Type and Number:
Japanese Patent JP6031651
Kind Code:
B2
Abstract:
A method for reducing an internal pressure of a vacuum chamber while preventing impurity contamination within the vacuum chamber as much as possible is provided. The method includes: rough pumping reducing an internal pressure of a vacuum chamber by using a roughing pump, the roughing pump being a mechanical pump that is capable of reducing the internal pressure of the vacuum chamber to be less than 15 Pa; main pumping reducing the internal pressure of the vacuum chamber by using a main pump after the rough pumping, the main pump being a non-mechanical pump. Transition from the rough pumping to the main pumping is performed when the internal pressure of the vacuum chamber is no less than 15 Pa.
Inventors:
Yuko Kawanami
Ryuta Yamada
Ryuta Yamada
Application Number:
JP2014507403A
Publication Date:
November 24, 2016
Filing Date:
March 19, 2013
Export Citation:
Assignee:
Joled Co., Ltd.
International Classes:
H05B33/10; F04B37/08; F04B37/16; H01L51/50
Domestic Patent References:
| JP2011044299A | ||||
| JP2011256129A | ||||
| JP2010013715A | ||||
| JP2009008474A | ||||
| JP2000192883A | ||||
| JP8138615A | ||||
| JP9250454A | ||||
| JP6093427A | ||||
| JP5004034A |
Attorney, Agent or Firm:
Patent business corporation Nakajima intellectual property integrated office
Previous Patent: A display, a manufacturing method for the same, and electronic equipment
Next Patent: MICROCOMPUTER INCORPORATING READ-ONLY MEMORY
Next Patent: MICROCOMPUTER INCORPORATING READ-ONLY MEMORY