Title:
振動素子及び振動素子の製造方法
Document Type and Number:
Japanese Patent JP5807226
Kind Code:
B2
Inventors:
Lee Noboru
Application Number:
JP2011141581A
Publication Date:
November 10, 2015
Filing Date:
June 27, 2011
Export Citation:
Assignee:
Ingen msl Co., Ltd.
International Classes:
H04R19/00; H01L29/84; H04R31/00
Domestic Patent References:
| JP2005295553A | ||||
| JP2008546239A | ||||
| JP2011101163A | ||||
| JP2008118631A |
Attorney, Agent or Firm:
Atsushi Ido
Nobuyuki Yamaguchi
Nobuyuki Yamaguchi