A manufacturing method of oxidization silicon - Shin-Etsu Chemical Co., Ltd.

Title:

A manufacturing method of oxidization silicon

Document Type and Number:

Japanese Patent JP6028702

Kind Code:

B2

Inventors:

Hirofumi Fukuoka

Application Number:

JP2013211844A

Publication Date:

November 16, 2016

Filing Date:

October 09, 2013

Export Citation:

Assignee:

Shin-Etsu Chemical Co., Ltd.

International Classes:

C01B33/113

Domestic Patent References:

Attorney, Agent or Firm:

Takashi Kojima
Saori Shigematsu
Katsunari Kobayashi
Takeshi Ishikawa
Katsuhiko Masaki

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