Title:
パターン化エレクトレット構造およびパターン化エレクトレット構造の製造方法
Document Type and Number:
Japanese Patent JP2012502493
Kind Code:
A
Abstract:
A patterned electret structure (21) on a substrate (10) comprises a dielectric structure comprising at least one non-patterned dielectric layer (22), and a charge pattern (14) in the dielectric structure and/or at a surface of a dielectric layer that is part of the dielectric structure and/or at an interface between dielectric layers that are part of the dielectric structure. By the presence of the non-patterned dielectric layer (22), the influence of the presence of a conductive substrate (10) on the charges (14) of the electret structure (21) is alleviated, hence increasing the charge stability over time. Moreover, in embodiments of the present invention, the charge stability is substantially independent of the width (W1, W2, W3) of the charge pattern. A method for manufacturing such patterned electret structure (21) is also provided.
Inventors:
Vladimir Leonov
Application Number:
JP2011526499A
Publication Date:
January 26, 2012
Filing Date:
September 11, 2009
Export Citation:
Assignee:
IMEC
International Classes:
H01G7/02
Domestic Patent References:
| JP2006108502A | 2006-04-20 | |||
| JP2008021787A | 2008-01-31 | |||
| JP2008112781A | 2008-05-15 | |||
| JPH06214440A | 1994-08-05 |
Attorney, Agent or Firm:
Takuji Yamada
Mitsuo Tanaka
Mikio Takeuchi
Mitsuo Tanaka
Mikio Takeuchi