Title:
A manufacturing method of a physical quantity sensor
Document Type and Number:
Japanese Patent JP6035733
Kind Code:
B2
Inventors:
Mountain Saki Seiji
Application Number:
JP2011277675A
Publication Date:
November 30, 2016
Filing Date:
December 19, 2011
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
G01P15/125; H01L29/84
Domestic Patent References:
| JP2010117265A | ||||
| JP2011017693A | ||||
| JP2011069648A | ||||
| JP2004294401A | ||||
| JP7245416A | ||||
| JP2007298408A | ||||
| JP2005066817A | ||||
| JP2011049211A | ||||
| JP2010169535A |
Attorney, Agent or Firm:
Tatsuya Masuda
Kazuo Asahi
Kazuo Asahi