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Title:
感圧センサの製造方法及び感圧センサ
Document Type and Number:
Japanese Patent JP5742670
Kind Code:
B2
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Inventors:
Hiroshi Oyama
Takashi Aoyama
Akio Hattori
Akira Yamaura
Yoshio Masatsugu
Application Number:
JP2011240477A
Publication Date:
July 01, 2015
Filing Date:
November 01, 2011
Export Citation:
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Assignee:
Hitachi Metals Co., Ltd.
International Classes:
H01H11/00; H01H13/18
Domestic Patent References:
JP11237289A
JP2007157652A
Attorney, Agent or Firm:
Hiroshi Okikawa



 
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