Title:
A manufacturing method of an quantum interference device, an atomic oscillator, electronic equipment, a mobile, and an atomic oscillator
Document Type and Number:
Japanese Patent JP6075138
Kind Code:
B2
Inventors:
Koji Kodo
Iwamoto Mio
Iwamoto Mio
Application Number:
JP2013057768A
Publication Date:
February 08, 2017
Filing Date:
March 21, 2013
Export Citation:
Assignee:
Seiko Epson Corporation
International Classes:
H01S1/06; H03L7/26
Domestic Patent References:
| JP2012191523A | ||||
| JP2006154028A | ||||
| JP4265907A |
Foreign References:
| US6265945 | ||||
| US6320472 | ||||
| US4462006 |
Attorney, Agent or Firm:
Kazuaki Watanabe
Keisuke Nishida
Satoshi Nakai
Keisuke Nishida
Satoshi Nakai