Title:
The manufacturing method of the replica template for nanoimprints, and a replica template
Document Type and Number:
Japanese Patent JP5935385
Kind Code:
B2
Inventors:
Koji Yoshida
Koji Ichimura
Masaaki Kurihara
Koji Ichimura
Masaaki Kurihara
Application Number:
JP2012040460A
Publication Date:
June 15, 2016
Filing Date:
February 27, 2012
Export Citation:
Assignee:
Dai Nippon Printing Co.,Ltd.
International Classes:
H01L21/027; B29C33/38; B29C59/02
Domestic Patent References:
| JP2012009623A | ||||
| JP2009536591A | ||||
| JP2011066238A | ||||
| JP2011245816A |
Foreign References:
| WO2011043820A1 |
Attorney, Agent or Firm:
Hiromi Fujimasu
Keiko Fukamachi
Hideo Ito
Naoki Goto
Yusuke Ito
Hideyuki Tateishi
Keiko Fukamachi
Hideo Ito
Naoki Goto
Yusuke Ito
Hideyuki Tateishi
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