Title:
A manufacturing method of the resin composition for photoresist, a manufacturing method of photoresist, and a manufacturing method of a liquid crystal device
Document Type and Number:
Japanese Patent JP6221316
Kind Code:
B2
Inventors:
Yuji Imamura
Application Number:
JP2013083606A
Publication Date:
November 01, 2017
Filing Date:
April 12, 2013
Export Citation:
Assignee:
Sumitomo Bakelite Co., Ltd.
International Classes:
G03F7/023; C08G8/12
Domestic Patent References:
| JP11202485A | ||||
| JP11052565A | ||||
| JP2002141265A | ||||
| JP11035650A | ||||
| JP2004043777A | ||||
| JP7114179A | ||||
| JP7110576A |
Foreign References:
| US5413894 |
Attorney, Agent or Firm:
Shinji Hayami