A manufacturing method of resin, a resist composition, and a resist pattern

Title:

A manufacturing method of resin, a resist composition, and a resist pattern

Document Type and Number:

Japanese Patent JP6261876

Kind Code:

B2

Inventors:

Koji Ichikawa
Akira Kamabuchi
Suzuki Yuki

Application Number:

JP2013100012A

Publication Date:

January 17, 2018

Filing Date:

May 10, 2013

Export Citation:

Assignee:

Sumitomo Chemical Co., Ltd.

International Classes:

C08F220/28; C08F220/38; G03F7/039; H01L21/027

Domestic Patent References:

Foreign References:

US20090068589

Attorney, Agent or Firm:

Shinki Global IP Patent Corporation

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