Title:
A manufacturing method of a resist composition and a resist pattern
Document Type and Number:
Japanese Patent JP6134562
Kind Code:
B2
Inventors:
Koji Ichikawa
Takayuki Miyagawa
Yuichi Mukai
Takayuki Miyagawa
Yuichi Mukai
Application Number:
JP2013082903A
Publication Date:
May 24, 2017
Filing Date:
April 11, 2013
Export Citation:
Assignee:
Sumitomo Chemical Co., Ltd.
International Classes:
G03F7/039; C08F220/28; G03F7/004; G03F7/038
Domestic Patent References:
| JP2009186952A | ||||
| JP2011219363A | ||||
| JP2011246439A | ||||
| JP2013225094A | ||||
| JP2012180499A | ||||
| JP2003327631A |
Foreign References:
| WO2013058250A1 |
Attorney, Agent or Firm:
Shinki Global IP Patent Corporation