Title:
A manufacturing method of a resist composition and a resist pattern
Document Type and Number:
Japanese Patent JP6205156
Kind Code:
B2
Inventors:
Koji Ichikawa
Satoshi Yamamoto
Shingo Fujita
Satoshi Yamamoto
Shingo Fujita
Application Number:
JP2013076592A
Publication Date:
September 27, 2017
Filing Date:
April 02, 2013
Export Citation:
Assignee:
Sumitomo Chemical Co., Ltd.
International Classes:
G03F7/004; C09K3/00; G03F7/038; G03F7/039
Domestic Patent References:
| JP2009186952A | ||||
| JP2012037864A | ||||
| JP2002351063A | ||||
| JP2003321466A | ||||
| JP2011113034A | ||||
| JP2010210953A |
Attorney, Agent or Firm:
Shinki Global IP Patent Corporation
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