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Patent Searching and Data


Title:
A manufacturing method of a resist composition and a resist pattern
Document Type and Number:
Japanese Patent JP6208974
Kind Code:
B2
Inventors:
市川 幸司
宮川 貴行
山口 訓史
Application Number:
JP2013095113A
Publication Date:
October 04, 2017
Filing Date:
April 30, 2013
Export Citation:
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Assignee:
住友化学株式会社
International Classes:
G03F7/004; C07D307/33; C07D307/93; C07D313/10; C07D327/06; C09K3/00; G03F7/038; G03F7/039
Domestic Patent References:
JP2011219363A
JP2012078405A
JP2004210670A
JP2012041274A
JP2013001715A
Foreign References:
WO2011125291A1
WO2012020546A1
Attorney, Agent or Firm:
新樹グローバル・アイピー特許業務法人



 
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