Title:
A manufacturing method of a resist composition and a resist pattern
Document Type and Number:
Japanese Patent JP6274761
Kind Code:
B2
Inventors:
Koji Ichikawa
Akira Kamabuchi
Suzuki Yuki
Akira Kamabuchi
Suzuki Yuki
Application Number:
JP2013135109A
Publication Date:
February 07, 2018
Filing Date:
June 27, 2013
Export Citation:
Assignee:
Sumitomo Chemical Co., Ltd.
International Classes:
G03F7/038; C08F20/28; G03F7/004; G03F7/039
Domestic Patent References:
| JP2012118518A | ||||
| JP2012108496A | ||||
| JP2011075687A | ||||
| JP2012027436A | ||||
| JP2012102323A | ||||
| JP2012073401A | ||||
| JP2011090284A | ||||
| JP2012111753A | ||||
| JP2005113118A |
Foreign References:
| WO2012053527A1 |
Attorney, Agent or Firm:
Shinki Global IP Patent Corporation
Previous Patent: A manufacturing method of a resist composition and a resist pattern
Next Patent: JPS6274762
Next Patent: JPS6274762