Title:
A manufacturing method of salt, resin, a resist composition, and a resist pattern
Document Type and Number:
Japanese Patent JP6244856
Kind Code:
B2
Inventors:
Hiroshi Sakamoto
Fumiho Furuyama
Koji Ichikawa
Fumiho Furuyama
Koji Ichikawa
Application Number:
JP2013243589A
Publication Date:
December 13, 2017
Filing Date:
November 26, 2013
Export Citation:
Assignee:
Sumitomo Chemical Co., Ltd.
International Classes:
C07D303/16; C07C381/12; C07D305/06; C08F20/38; G03F7/004; G03F7/039; H01L21/027
Domestic Patent References:
| JP2011246439A | ||||
| JP2011037836A | ||||
| JP2011038091A | ||||
| JP2012177836A | ||||
| JP2010132852A |
Attorney, Agent or Firm:
Toru Nakayama
Toru Sakamoto
Toru Sakamoto
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