Quartz glass parts and manufacturing method of quartz glass parts

Title:

Quartz glass parts and manufacturing method of quartz glass parts

Document Type and Number:

Japanese Patent JP6326210

Kind Code:

B2

Abstract:

A quartz glass part silicon powder is plasma-sprayed onto a surface of a quartz glass substrate and thereby a coating film is formed, the quartz glass substrate is composed of opaque quartz glass a fraction of grains having a diameter of 100 μm or larger in the silicon powder is 3% or smaller.

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Inventors:

Hiromichi Isogai
Kato Masahide
Umezu Yasuhiro
Ryo Yamazaki
Yoichiro Dou

Application Number:

JP2013205494A

Publication Date:

May 16, 2018

Filing Date:

September 30, 2013

Export Citation:

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Assignee:

Techno Quartz Co., Ltd.
Tocalo Co., Ltd.

International Classes:

C03C17/04; C03C15/00; C03C23/00

Domestic Patent References:

JP2005350685A
JP2010042991A
JP11199252A
JP2009054984A
JP2012084848A
JP2011032115A

Attorney, Agent or Firm:

Hideno Kono
Nobuo Kono

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