Title:
SUBSTRATE AGENT COMPOSITION AND MANUFACTURING METHOD OF STRUCTURE CONTAINING PHASE SEPARATION STRUCTURE
Document Type and Number:
Japanese Patent JP2016108435
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To provide a substrate agent composition and a manufacturing method of a structure containing a phase separate structure.SOLUTION: There is provided a substrate agent composition used for phase separation of a layer containing a block copolymer on a substrate, containing a resin component (N) which has a hydrophobic constitutional unit (Nx) and a hydrophilic constitutional unit (Ny) and has the content of the constitutional unit (Ny) of 5 mol% or less.SELECTED DRAWING: None
Inventors:
YAMANO HITOSHI
MATSUMIYA YU
YAHAGI MASATO
KUROSAWA TSUYOSHI
MIYAGI MASARU
MATSUMIYA YU
YAHAGI MASATO
KUROSAWA TSUYOSHI
MIYAGI MASARU
Application Number:
JP2014246801A
Publication Date:
June 20, 2016
Filing Date:
December 05, 2014
Export Citation:
Assignee:
TOKYO OHKA KOGYO CO LTD
International Classes:
C09D125/04; B05D7/24; B32B27/30; B82Y30/00; B82Y40/00; C08F212/04; C09D133/04
Domestic Patent References:
| JP2014185318A | 2014-10-02 | |||
| JP2014185311A | 2014-10-02 | |||
| JP2013216859A | 2013-10-24 | |||
| JP2011129241A | 2011-06-30 | |||
| JP2016528713A | 2016-09-15 | |||
| JP2014187103A | 2014-10-02 | |||
| JP2012078830A | 2012-04-19 |
Foreign References:
| WO2014098025A1 | 2014-06-26 | |||
| WO2014184114A1 | 2014-11-20 |
Attorney, Agent or Firm:
Sumio Tanai
Masatake Shiga
Matsumoto
Ryu Miyamoto
Masato Iida
Masatake Shiga
Matsumoto
Ryu Miyamoto
Masato Iida