Title:
A manufacturing method of a substrate using the manufacturing method of a cellulose derivative constituent, the constituent for polish using the cellulose derivative constituent concerned, and the constituent for polish concerned, and the constituent for polish concerned
Document Type and Number:
Japanese Patent JP6105916
Kind Code:
B2
Inventors:
Kosuke Tsuchiya
Yusuke Suga
川▲崎▼ 雄介
Daiki Ichitsubo
Takahashi Shuhei
Minoru Inoue
Yusuke Suga
川▲崎▼ 雄介
Daiki Ichitsubo
Takahashi Shuhei
Minoru Inoue
Application Number:
JP2012274867A
Publication Date:
March 29, 2017
Filing Date:
December 17, 2012
Export Citation:
Assignee:
Fujimi Incorporated Co., Ltd.
International Classes:
C08L1/08; B24B37/00; C08J3/215; C08K3/36; C08K5/17; C09K3/14; H01L21/304
Domestic Patent References:
| JP11116942A | ||||
| JP2012079964A |
Foreign References:
| WO2005029563A1 |
Attorney, Agent or Firm:
Hatta International Patent Corporation