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Title:
透明導電膜付き基板の製造方法ならびに多接合型薄膜光電変換装置および発光素子の製造方法
Document Type and Number:
Japanese Patent JP5559704
Kind Code:
B2
Abstract:
Disclosed is a substrate with a transparent conductive film, wherein an underlying layer and a transparent conductive film are arranged in this order on a transparent insulating substrate. The transparent conductive film-side surface of the underlying layer is provided with a pyramid-shaped or inverse pyramid-shaped irregular structure, and the transparent conductive film comprises a first transparent electrode layer which is formed on the underlying layer and a second transparent electrode layer which forms the outermost surface of the transparent conductive film. By forming a zinc oxide layer that serves as the second transparent electrode layer by a reduced pressure CVD method, a substrate with a transparent conductive film that is provided with an irregular structure smaller than that of the underlying layer can be obtained. The substrate with a transparent conductive film can improve the conversion efficiency of a photoelectric conversion device through an increased light trapping effect.

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Inventors:
Tomomi Meguro
Kenji Yamamoto
Application Number:
JP2010549451A
Publication Date:
July 23, 2014
Filing Date:
January 29, 2010
Export Citation:
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Assignee:
KANEKA Co.
International Classes:
H01L31/0236; H01L31/0224; H01L31/076; H01L31/18; H01L51/50; H05B33/02; H05B33/10; H05B33/28
Domestic Patent References:
JP2005347490A2005-12-15
JP2000252500A2000-09-14
JPS61216489A1986-09-26
JPH09139515A1997-05-27
JP2003115601A2003-04-18
JPH03125481A1991-05-28
JPH01132004A1989-05-24
JP2002352956A2002-12-06
JP2005311292A2005-11-04
JP2008153570A2008-07-03
JP2007288043A2007-11-01
JPH07131044A1995-05-19
JP2004168636A2004-06-17
JP2005347490A2005-12-15
JP2000252500A2000-09-14
JPS61216489A1986-09-26
JPH09139515A1997-05-27
JP2003115601A2003-04-18
Foreign References:
WO2008062685A12008-05-29
WO2008148978A22008-12-11
WO2008062685A12008-05-29
Attorney, Agent or Firm:
Masahito Shintaku
Tsuyoshi Yoshimoto



 
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