Title:
A manufacturing method of a switching element and a switching element
Document Type and Number:
Japanese Patent JP5941335
Kind Code:
B2
Inventors:
Masayuki Tajiri
Application Number:
JP2012107901A
Publication Date:
June 29, 2016
Filing Date:
May 09, 2012
Export Citation:
Assignee:
Sharp Corporation
International Classes:
H01L21/338; H01L21/316; H01L21/336; H01L29/778; H01L29/78; H01L29/786; H01L29/812
Domestic Patent References:
| JP2012009501A | ||||
| JP2004311869A |
Attorney, Agent or Firm:
Yoshifumi Masaki
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