Title:
A manufacturing method of the thin film by the ALD method using an aluminium compound
Document Type and Number:
Japanese Patent JP5912911
Kind Code:
B2
Inventors:
Field Se Masako
Atsushi Sakurai
Swan wings
Atsushi Sakurai
Swan wings
Application Number:
JP2012142927A
Publication Date:
April 27, 2016
Filing Date:
June 26, 2012
Export Citation:
Assignee:
ADEKA CORPORATION
International Classes:
C23C16/40; H01L21/316
Domestic Patent References:
| JP2010502541A | ||||
| JP59027952A |
Other References:
Chemical Vapor Deposition ,2001年,Vol.7, No.2, p.69-74
Surface and Coatings Technology,2002年,Vol.160, No.2-3,p.124-131
Journal of Organometallic Chemistry,1971年,Vol.26, No.3,p.313-320
Surface and Coatings Technology,2002年,Vol.160, No.2-3,p.124-131
Journal of Organometallic Chemistry,1971年,Vol.26, No.3,p.313-320
Attorney, Agent or Firm:
Showa International Patent Office
Osamu Hatori
Hiromi Nakano
Osamu Hatori
Hiromi Nakano