A manufacturing method of a transistor - Yokogawa Electric Corporation

Title:

A manufacturing method of a transistor

Document Type and Number:

Japanese Patent JP6205017

Kind Code:

B2

Inventors:

Yukihiro Shintani
Toshiyuki Sarutani
Hiroshi Kawarada

Application Number:

JP2016119311A

Publication Date:

September 27, 2017

Filing Date:

June 15, 2016

Export Citation:

Assignee:

Yokogawa Electric Corporation
Waseda University

International Classes:

H01L29/786; C30B29/04; G01N27/414; G01N27/416; H01L21/336

Domestic Patent References:

Attorney, Agent or Firm:

Sumio Tanai
Yoshifumi Saeki
Hisanori Takahashi
Takeo Okita

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