Title:
METHOD FOR MANUFACTURING ULTRASONIC TRANSDUCER
Document Type and Number:
Japanese Patent JP2019169511
Kind Code:
A
Abstract:
To provide a method for stably manufacturing an ultrasonic transducer capable of emitting high-frequency ultrasonic waves.SOLUTION: An ultrasonic transducer 1 is formed by maintaining mechanical strength by leaving a part of a piezoelectric substrate 10 as a peripheral portion, making an area surrounded by the peripheral portion to a desired thickness, and dividing into pieces.SELECTED DRAWING: Figure 2
Inventors:
TAKEUCHI OSAMU
MASUMOTO NAOMI
KOUCHI HIROYUKI
KIKUCHI TOSHIKATSU
MASUMOTO NAOMI
KOUCHI HIROYUKI
KIKUCHI TOSHIKATSU
Application Number:
JP2018054172A
Publication Date:
October 03, 2019
Filing Date:
March 22, 2018
Export Citation:
Assignee:
NEW JAPAN RADIO CO LTD
International Classes:
H01L41/332; H01L41/338; H04R31/00
Domestic Patent References:
| JP2011078118A | 2011-04-14 | |||
| JP2012182758A | 2012-09-20 | |||
| JP2010098457A | 2010-04-30 | |||
| JPH0879895A | 1996-03-22 |