Title:
容量式の真空測定セルの製造方法および容量式の真空測定セルを用いた測定方法
Document Type and Number:
Japanese Patent JP4764468
Kind Code:
B2
Abstract:
A capacitive vacuum measuring cell includes first and second ceramic housing bodies ( 1, 4 ) joined by an edge seal ( 3 ). A thin ceramic membrane ( 2 ) is supported between first and second housing bodies ( 1, 4 ) by the edge seal ( 3 ) at a small distance from the first housing body ( 1 ) creating a reference vacuum chamber ( 25 ) therebetween. An electrically conductive material ( 7 ) coats opposing surfaces of the first housing body ( 1 ) and the membrane ( 2 ) to form a capacitor. A measurement vacuum chamber ( 26 ) is provided between the membrane ( 2 ) and the second housing body ( 4 ). A port ( 5 ) communicates with the second housing body ( 4 ) to connect the measurement vacuum chamber ( 26 ) of the measuring cell to the medium to be measured. The membrane ( 2 ) is made from an Al2O3 slurry that is sintered in a first heating step, cooled, and then reheated to smooth the membrane.
Inventors:
Björkman, Pell
Rousson Olsson
Rousson Olsson
Application Number:
JP2008263935A
Publication Date:
September 07, 2011
Filing Date:
October 10, 2008
Export Citation:
Assignee:
Inficon GmbH
International Classes:
G01L9/04; G01L21/00; G01L7/08; G01L9/00; G01L9/12
Domestic Patent References:
| JP9280986A | ||||
| JP3054431A | ||||
| JP8005494A | ||||
| JP9318476A | ||||
| JP6109571A | ||||
| JP2141476A | ||||
| JP4290936A | ||||
| JP64012238A |
Attorney, Agent or Firm:
Kuro Fukami
Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Hisato Noda
Masayuki Sakai
Nobuo Arakawa
Toshio Morita
Yoshihei Nakamura
Yutaka Horii
Hisato Noda
Masayuki Sakai
Nobuo Arakawa