Title:
ウェーハの製造方法及びウェーハの製造装置
Document Type and Number:
Japanese Patent JP5586922
Kind Code:
B2
Inventors:
Suzuki 優作
Application Number:
JP2009254183A
Publication Date:
September 10, 2014
Filing Date:
November 05, 2009
Export Citation:
Assignee:
SUMCO TECHXIV, Inc.
International Classes:
B24B5/50; B24B5/04; B24B41/06; H01L21/304
Attorney, Agent or Firm:
Kenji Sugimura