Title:
チャックテーブルの製造方法
Document Type and Number:
Japanese Patent JP6543525
Kind Code:
B2
Inventors:
Yang Yunfeng
Wu
Wu
Application Number:
JP2015139077A
Publication Date:
July 10, 2019
Filing Date:
July 10, 2015
Export Citation:
Assignee:
Disco Co., Ltd.
International Classes:
B23Q3/08; B24B41/06
Domestic Patent References:
| JP5013051U | ||||
| JP6008087A | ||||
| JP11010472A | ||||
| JP55167154A | ||||
| JP63263396A | ||||
| JP2009210295A | ||||
| JP55065809A | ||||
| JP55161306A | ||||
| JP2001010337A |
Foreign References:
| US20110309647 |
Attorney, Agent or Firm:
Hiroaki Sakai