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Title:
含フッ素ノルボルネン誘導体の製造法
Document Type and Number:
Japanese Patent JP4186819
Kind Code:
B2
Abstract:
Manufacture of a fluorine-containing norbornene derivative having a fluorine-containing ketone structure comprises reacting a norbornene derivative and a fluoroalkylating agent. Manufacture of a fluorine-containing norbornene derivative having a fluorine-containing ketone structure of formula (II) comprises reacting a norbornene derivative of formula (I) and a fluoroalkylating agent which introduces Rf 1>to the X in (I). [Image] [Image] X : -(R 1>) n2-X 1>; X 1>-COOR 2>or -C(=O)X 2>; R 2>1-5C alkyl group; X 2>halogen atom; R 1>divalent organic group; n2 : 0 or 1; Y : H, F, Cl, 1-10C alkyl group or fluoroalkyl group optionally containing an ether bond; n : 0-5; m : 1-5; m + n1 : 6; Rf 1>1-10C fluoroalkyl group optionally containing an ether bond; and Z : -(R 1>) n2-C(=O)Rf 1>. Independent claims are also included for the following: (1) manufacture of a fluorine-containing norbornene derivative having a fluoroalcohol structure; (2) a norbornene derivative having a fluorine-containing ketone structure of formula (V); (3) norbornene derivatives having a fluoroalcohol structure; (4) a fluorine-containing polymer of number average molecular weight 500-1000000, of formula -(M1)-(M2)-(N)-; (5) a chemically-amplified photoresist composition including the polymer, photo-acid generating agent and solvent. [Image] [Image] [Image] Z 3>-C(=O)Rf 3>; Rf 3>1-10C fluoroalkyl group optionally containing an ether bond or of formula (VI) or (VII); M1 : unit derived from a norbornene derivative; M2 : unit derived from 2-3C ethylenic monomer; N : a copolymerizable monomer.

Inventors:
Takayuki Araki
Takuji Ishikawa
Kume Takuji
Akinori Yamamoto
Application Number:
JP2003512187A
Publication Date:
November 26, 2008
Filing Date:
July 12, 2002
Export Citation:
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Assignee:
Daikin Industries, Ltd.
International Classes:
C07C33/44; C07C29/38; C07C43/172; C07C43/313; C07C45/45; C07C49/567; C07C61/28; C07C69/96; G03F7/004; G03F7/038; G03F7/039; C08F32/08
Domestic Patent References:
JP2002255875A
JP2003020335A
JP2001296662A
JP2001302735A
JP2002201219A
JP61037825A
Foreign References:
WO2002036533A1
Other References:
PIRKLE W. H.,J. ORG. CHEM.,1980年,V45,P1379-1382
KRASOVSKY A. L.,TETRAHEDRON,2001年 1月 1日,V57N1,P201-209
Attorney, Agent or Firm:
Sota Asahina