Title:
多孔状基板上にパターン電極をコンタクトさせる方法とその素子
Document Type and Number:
Japanese Patent JP2007534162
Kind Code:
A
Abstract:
A method for contacting patterned electrode devices includes the steps of providing a porous substrate, depositing electrically conductive material to form at least one electrode on a front-side of the porous substrate and depositing at least one electrically conductive back-side contact trace on the back-side of the substrate. A portion of the electrically conductive material penetrates into the substrate. A device is formed including the electrode on the front side of the substrate, wherein the electrode is electrically coupled by a conducting channel including the electrically conductive material through the substrate to the back-side contact trace.
Inventors:
Reynolds, John Earl.
Argan, Abniey.
Berard, Mathieu
Aubert, Pierre Ash.
Argan, Abniey.
Berard, Mathieu
Aubert, Pierre Ash.
Application Number:
JP2006541362A
Publication Date:
November 22, 2007
Filing Date:
November 19, 2004
Export Citation:
Assignee:
University of Florida Research Foundation, Inc.
International Classes:
H01L21/768; G02F1/15; G02F1/155; H01G7/00; H01L51/00; H02N2/00; H01L21/316; H01L27/32
Domestic Patent References:
| JPH04204521A | 1992-07-24 | |||
| JPS61145536A | 1986-07-03 | |||
| JP2005510619A | 2005-04-21 | |||
| JPH11168104A | 1999-06-22 | |||
| JP2003251737A | 2003-09-09 | |||
| JP2004006290A | 2004-01-08 | |||
| JPH0372328A | 1991-03-27 | |||
| JPH0429220A | 1992-01-31 | |||
| JPH01213625A | 1989-08-28 |
Foreign References:
| WO2003046106A1 | 2003-06-05 |
Attorney, Agent or Firm:
Hironobu Onda
Makoto Onda
Makoto Onda