EUV exposure mask and its manufacturing method

Title:

EUV exposure mask and its manufacturing method

Document Type and Number:

Japanese Patent JP6340800

Kind Code:

B2

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Inventors:

Satoshi Takahashi
Yutaka Kodera
Norihito Fukugami

Application Number:

JP2014011203A

Publication Date:

June 13, 2018

Filing Date:

January 24, 2014

Export Citation:

Assignee:

Toppan Printing Co., Ltd.

International Classes:

G03F1/24; G03F1/60

Domestic Patent References:

Foreign References:

US20040219437

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