Title:
薄膜堆積用マスク及び薄膜堆積装置
Document Type and Number:
Japanese Patent JP4375649
Kind Code:
B2
More Like This:
Inventors:
Yoshifumi Oda
Application Number:
JP2002249986A
Publication Date:
December 02, 2009
Filing Date:
August 29, 2002
Export Citation:
Assignee:
Shibaura Mechatronics Co., Ltd.
International Classes:
C23C14/04; C23C14/34
Domestic Patent References:
| JP10053857A | ||||
| JP10106051A | ||||
| JP2000119841A | ||||
| JP62177167A | ||||
| JP5078833A | ||||
| JP11036061A |
Attorney, Agent or Firm:
Masahiko Hinataji
Mitsuyuki Matsuyama
Mitsuyuki Matsuyama