Title:
原料気化供給装置および原料気化供給方法
Document Type and Number:
Japanese Patent JP6382175
Kind Code:
B2
Inventors:
Tadashi Takahashi
Application Number:
JP2015228704A
Publication Date:
August 29, 2018
Filing Date:
November 24, 2015
Export Citation:
Assignee:
THE FURUKAW ELECTRIC CO.,LTD.
International Classes:
B01J7/02; C03B8/02; C03B37/018
Domestic Patent References:
| JP11288926A | ||||
| JP11312649A | ||||
| JP2003282449A | ||||
| JP2004338996A | ||||
| JP58195643U |
Foreign References:
| US3917461 |
Attorney, Agent or Firm:
Sakai International Patent Office