Title:
MEASUREMENT RESULT REPORT DEVICE, MEASUREMENT SYSTEM AND MEASUREMENT RESULT REPORT METHOD
Document Type and Number:
Japanese Patent JP2017187438
Kind Code:
A
Abstract:
PROBLEM TO BE SOLVED: To easily grasp a measurement result about a number of inspection spots prescribed for a substrate being inspected.SOLUTION: The present invention includes a processing unit for visually reporting a measurement result in such a manner that the quality of each inspection spot is specifiable, on the basis of measured value data composed of measured values measured with regard to each of a plurality of inspection spots prescribed for a substrate being inspected that are recorded in correlation to a "code" individually assigned to each inspection spot, and reference value data composed of reference values per inspection spot that are recorded in correlation to the "code." The processing unit computes a "value for specification" by which the quality level of each inspection spot is specifiable, on the basis of the measured values and the reference values, as well as draws the brightness of each unit display cell C in a state of being correlated to the "value for specification" with regard to a cell sequence Cl in which unit display cells C each indicating a quality level per inspection spot are aligned in order of measurement step No. to generate image data for report, and reports a measurement result about each inspections spot on the basis of the generated image data for report.SELECTED DRAWING: Figure 2
Inventors:
KUBOTA YU
Application Number:
JP2016077928A
Publication Date:
October 12, 2017
Filing Date:
April 08, 2016
Export Citation:
Assignee:
HIOKI ELECTRIC WORKS
International Classes:
G01D7/08; G01R31/02
Domestic Patent References:
| JP2002357629A | 2002-12-13 | |||
| JP2010177293A | 2010-08-12 | |||
| JP2003004791A | 2003-01-08 | |||
| JPH09199551A | 1997-07-31 | |||
| JP2003139720A | 2003-05-14 |
Attorney, Agent or Firm:
Shinji Sakai