Title:
測定装置、光源装置、干渉測定装置、露光装置、及びデバイス製造方法
Document Type and Number:
Japanese Patent JP5558768
Kind Code:
B2
Abstract:
A wavelength shift measuring apparatus of the present invention is a wavelength shift detector (WLCD1) which measures a shift of a wavelength of a light beam emitted from a light source, and includes a beam splitter (BS2) splitting the light beam emitted from the light source into a plurality of light beams and to synthesize two light beams among the plurality of light beams to generate an interference light, a spacer member (SP) provided so that an optical path length difference of the two light beams split by the beam splitter (PBS2) is constant, and a plurality of photoelectric sensors (PD) detecting the interference light generated by the beam splitter (BS2). The plurality of photoelectric sensors (PD) output a plurality of interference signals having phases shifted from one another based on the interference light to measure a wavelength shift using the plurality of interference signals.
Inventors:
Hiroshi Ishizuka
Application Number:
JP2009223435A
Publication Date:
July 23, 2014
Filing Date:
September 28, 2009
Export Citation:
Assignee:
Canon, Inc.
International Classes:
G01J9/02; G01B9/02; G01B11/00; H01L21/027
Attorney, Agent or Firm:
Ryosuke Fujimoto
Atsuya Mizumoto
Atsuya Mizumoto