Measurement device for test objects and manufacturing method for articles

Title:

Measurement device for test objects and manufacturing method for articles

Document Type and Number:

Japanese Patent JP6362058

Kind Code:

B2

Inventors:

Uemura Takanori

Application Number:

JP2013120158A

Publication Date:

July 25, 2018

Filing Date:

June 06, 2013

Export Citation:

Assignee:

Canon Inc

International Classes:

G01B11/24

Domestic Patent References:

Attorney, Agent or Firm:

Takuma Abe
Sogo Kuroiwa

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