Title:
The measuring method of the molecular weight of a polymer, a manufacturing method of a polymer, a manufacturing method of a resist composition, and a manufacturing method of a substrate with which the pattern was formed
Document Type and Number:
Japanese Patent JP6086343
Kind Code:
B2
Inventors:
Atsushi Yasuda
Yo Momose
Hiroaki Sato
Yo Momose
Hiroaki Sato
Application Number:
JP2012219589A
Publication Date:
March 01, 2017
Filing Date:
October 01, 2012
Export Citation:
Assignee:
Mitsubishi Rayon Co., Ltd.
National Institute of Advanced Industrial Science and Technology
National Institute of Advanced Industrial Science and Technology
International Classes:
G01N27/62; G01N27/64; G01N30/04; G01N30/26; G01N30/32; G01N30/74; G01N30/86; G01N30/88; G03F7/039
Domestic Patent References:
| JP2012177111A | ||||
| JP2012122761A | ||||
| JP2004325265A | ||||
| JP2005147734A | ||||
| JP2009108084A | ||||
| JP2002072487A | ||||
| JP2011232651A |
Foreign References:
| WO2005113617A1 |
Attorney, Agent or Firm:
Masatake Shiga
Tadashi Takahashi
Suzuki Mitsuyoshi
Tadashi Takahashi
Suzuki Mitsuyoshi
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