Title:
A measuring method of the optical characteristic, and a measuring device of the optical characteristic
Document Type and Number:
Japanese Patent JP6273504
Kind Code:
B2
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Inventors:
Lotus flower
Eiichi Kondo
Eiichi Kondo
Application Number:
JP2014016281A
Publication Date:
February 07, 2018
Filing Date:
January 31, 2014
Export Citation:
Assignee:
Yamanashi University
International Classes:
G01N21/21; G01N21/23
Domestic Patent References:
| JP2010145332A |
Foreign References:
| WO2006103953A1 | ||||
| US6034777 |
Other References:
Gerald E. Jellison, Jr.,Windows in ellipsometry measurements,APPLIED OPTICS,1999年 8月 1日,Vol. 38, No. 22,pp. 4784-4789
A. STRAAIJER et al.,THE INFLUENCE OF CELL WINDOW IMPERFECTIONS ON THE CALIBRATION AND MEASURED DATA OF TWO TYPES OF ROTATING-ANALYZER ELLIPSOMETERS,Surface Science,1980年,Vol. 96,pp. 217-231
N. Nissim et al.,In situ correction of windows' linear birefringence in ellipsometry measurements,Optics Communications,2009年,Vol. 282,pp. 3414-3420
A. STRAAIJER et al.,THE INFLUENCE OF CELL WINDOW IMPERFECTIONS ON THE CALIBRATION AND MEASURED DATA OF TWO TYPES OF ROTATING-ANALYZER ELLIPSOMETERS,Surface Science,1980年,Vol. 96,pp. 217-231
N. Nissim et al.,In situ correction of windows' linear birefringence in ellipsometry measurements,Optics Communications,2009年,Vol. 282,pp. 3414-3420
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