Title:
定量送液ポンプおよびそれを用いた薬液塗布装置
Document Type and Number:
Japanese Patent JP4916793
Kind Code:
B2
Inventors:
Akira Sakurai
Application Number:
JP2006180806A
Publication Date:
April 18, 2012
Filing Date:
June 30, 2006
Export Citation:
Assignee:
Saginomiya Co., Ltd.
International Classes:
F04B13/00; B05C5/00; B05C11/10; F04B43/10
Domestic Patent References:
| JP11107924A | ||||
| JP54051004A | ||||
| JP48020807B1 | ||||
| JP9014451A | ||||
| JP10047234A | ||||
| JP2002257033A | ||||
| JP9310681A | ||||
| JP9170559A |
Attorney, Agent or Firm:
Koji Makimura
Chihata Takahata
Toru Suzuki
Chihata Takahata
Toru Suzuki