Title:
アミドイミン配位子を含む金属複合体
Document Type and Number:
Japanese Patent JP2016540038
Kind Code:
A
Abstract:
一つまたは複数のアミドイミン配位子を含む金属複合体、上記金属複合体の製造方法、および金属含有被膜を製造する上記金属複合体の使用方法を提供する。
Inventors:
Ravi, Canjolia
Garrat Sean
David Thompson
Antis, Jeffrey
Garrat Sean
David Thompson
Antis, Jeffrey
Application Number:
JP2016552193A
Publication Date:
December 22, 2016
Filing Date:
October 24, 2014
Export Citation:
Assignee:
SFC High Tech Incorporated
International Classes:
C07C211/65; C07F13/00; C23C16/18; C23C16/40; C23C16/455; H01L21/316; H01L21/318
Foreign References:
| WO2012067439A2 | 2012-05-24 | |||
| WO2012176988A1 | 2012-12-27 | |||
| WO2012060428A1 | 2012-05-10 |
Other References:
BORISOV, V. O. , ET AL., INORGANIC MATERIALS, vol. 31(8), JPN6018018360, 1995, pages pp. 1026-1027
Attorney, Agent or Firm:
Harakenzo world patent & trademark