Title:
電子ビーム、ディープＵＶおよび極短ＵＶフォトレジスト用途の有機共配位子を含む金属ペルオキソ化合物
Document Type and Number:
Japanese Patent JP2015513540
Kind Code:
A
Abstract:
【課題】電子ビーム、深ＵＶおよび極ＵＶフォトレジスト用途の有機補助配位子を含む金属ペルオキソ化合物を提供する。【解決手段】下記式（３）を有する組成物。［Ｃ’］ｋ［Ｔａ（Ｏ２）ｘ（Ｌ’）ｙ］（３）、（上記式中、ｘは１〜４の整数であり、ｙは１〜４の整数であり、Ｔａ（Ｏ２）ｘ（Ｌ’）ｙは０〜−３の電荷を有し、Ｃ’は＋１〜＋３の電荷を有する対イオンであり、ｋは０〜３の整数であり、Ｌ’は０〜−４の電荷を有する酸化に安定な有機配位子であり、Ｌ’はカルボキシレート、アルコキシド、アミン、アミンオキシド、ホスフィン、ホスフィンオキシド、アルシンオキシドおよびこれらの組み合わせからなる群から選択される電子供与性官能基を含む。）を開示する。本組成物は、高解像度フォトレジストとして有用である。【選択図】図１
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Inventors:
Bass, john, david
Sandberg, Linda, Karin
Wallraf, Gregory, Michael
Miller, Robert, Dennis
Kim, Ho-Chel
Song, Chin
Sandberg, Linda, Karin
Wallraf, Gregory, Michael
Miller, Robert, Dennis
Kim, Ho-Chel
Song, Chin
Application Number:
JP2014558230A
Publication Date:
May 14, 2015
Filing Date:
February 12, 2013
Export Citation:
Assignee:
INTERNATIONAL BUSINESS MACHINES CORPORATION
International Classes:
C07C55/06; C07C59/06; C07C59/08; G03F7/004; H01L21/027
Domestic Patent References:
| JPH05501164A | 1993-03-04 | |||
| JPS63100448A | 1988-05-02 | |||
| JP2003238573A | 2003-08-27 | |||
| JP2006182714A | 2006-07-13 | |||
| JP2013023407A | 2013-02-04 |
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Attorney, Agent or Firm:
Shinya Mayama
Takeshi Ueno
Tasaichi Tanae
Takeshi Ueno
Tasaichi Tanae