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Title:
サンプルを含む流体のSEM検査のための方法
Document Type and Number:
Japanese Patent JP2005529341
Kind Code:
A
Abstract:
A method of visualizing a sample in a wet environment including introducing a sample into a specimen enclosure in a wet environment and scanning the sample in the specimen enclosure in a scanning electron microscope, thereby visualizing the sample.

Inventors:
Behar, Beled
Netchustan, Amots
Krieger, Joseph
Giliardi, offers
Application Number:
JP2004511867A
Publication Date:
September 29, 2005
Filing Date:
June 01, 2003
Export Citation:
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Assignee:
Quantmix Limited
International Classes:
G01N23/203; B01L3/00; G01N23/00; G01N23/225; G01N25/00; G21K5/08; G21K7/00; H01J3/14; H01J37/20; H01J37/22; H01J37/244; H01J37/252; H01J37/256; H01J37/28; G01N1/36; G02B; (IPC1-7): G01N23/203; G01N23/225; H01J37/20; H01J37/22; H01J37/252; H01J37/28
Domestic Patent References:
JPS5142461A1976-04-10
JPH10283962A1998-10-23
JPS4724960A
JPS53120258A1978-10-20
JPH06318445A1994-11-15
JP2001084939A2001-03-30
JP2004515049A2004-05-20
JP2003139703A2003-05-14
JP2000133186A2000-05-12
JPS4724961A
Other References:
田邊哲朗、武藤俊介、遠竹聡: "CL測定用TEM試料ホルダーの開発と応用", 電子顕微鏡学会第57回学術講演会 発表要旨集, JPN7008007372, May 2001 (2001-05-01), JP, pages 112, ISSN: 0001147280
Attorney, Agent or Firm:
Kazuo Shamoto
Tadashi Masui
Yasushi Kobayashi
Akio Chiba
Hiroyuki Tomita
Toru Miyamae