Title:
COLLECTION METHOD FOR METAL IMPURITY IN ENVIRONMENTAL ATMOSPHERE, EVALUATION METHOD FOR METAL IMPURITY IN ENVIRONMENTAL ATMOSPHERE, AND COLLECTION DEVICE FOR METAL IMPURITY
Document Type and Number:
Japanese Patent JP2022077397
Kind Code:
A
Abstract:
To provide a collection method for metal impurities in an environmental atmosphere that not only has small variance among analysis results when evaluating collected metal impurities, but also never discharges acid exhaust causing corrosion into the environment.SOLUTION: There is provided a collection method for metal impurities in an environmental atmosphere by an impinger method, which includes the processes of: (1) sucking the environmental atmosphere 2 including metal impurities into a collection tank 3 containing a collection liquid 4 of pH0 to pH4, letting the collection liquid bubble, and dissolving and collecting the metal impurities in the collection liquid; (2) sucking an exhaust from the collection tank into a neutralization tank 5, letting a neutralization liquid 6 bubble, and neutralizing an acid gas included in the exhaust from the collection tank; and (3) sucking an exhaust from the neutralization tank into an absorption tank 8, letting an absorption liquid 9 bubble, and dissolving and absorbing an unneutralized acid gas and/or an alkaline gas included in an exhaust from the neutralization tank in the absorption liquid.SELECTED DRAWING: Figure 1-1
Inventors:
ARAKI KENJI
Application Number:
JP2020188244A
Publication Date:
May 23, 2022
Filing Date:
November 11, 2020
Export Citation:
Assignee:
SHINETSU HANDOTAI KK
International Classes:
G01N1/02; G01N1/28
Attorney, Agent or Firm:
Mikio Yoshimiya
Toshihiro Kobayashi
Toshihiro Kobayashi
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