Title:
A method for connecting two surfaces of metal eternally
Document Type and Number:
Japanese Patent JP6272805
Kind Code:
B2
Abstract:
The method involves processing metal surfaces of two respective substrates by production of adjacent-surface layers with defects. The adjacent-surface layers are produced by implanting ions of gas and/or deposition of an inferior metal layer and/or application of metallic nanoparticles. A permanent, electrically conductive connection is produced predominantly by substitution diffusion between metal ions and/or metal atoms of the metal surfaces during a connection of the metal surfaces. The metal surfaces are oriented and connected at maximum process temperature of 300 degree Celsius.
Inventors:
Marx Vimpinger
Viorel Dragoi
Viorel Dragoi
Application Number:
JP2015170133A
Publication Date:
January 31, 2018
Filing Date:
August 31, 2015
Export Citation:
Assignee:
Afau Group A Tarner Gamebehr
International Classes:
H01L21/52; H01L21/02
Domestic Patent References:
| JP2006517344A | ||||
| JP201046696A |
Foreign References:
| US20090134501 |
Attorney, Agent or Firm:
Einzel Felix-Reinhard
Takuya Kuno
Takuya Kuno
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