Title:
A method and a device for generating optical radiation according to an electric pulse discharge
Document Type and Number:
Japanese Patent JP5982486
Kind Code:
B2
Abstract:
The present invention relates to a method and device for generating optical radiation (18), in particular EUV radiation or soft x-rays, by means of electrically operated discharges. A plasma (15) is ignited in a gaseous medium between at least two electrodes (1, 2), wherein said gaseous medium is produced at least partly from a liquid material (6), which is applied to one or several surface(s) moving in the discharge space and is at least partially evaporated by one or several pulsed energy beam(s)(9). At least two consecutive pulses (16) are applied within a time interval of each electrical discharge onto said surface(s). The delay between and/or the pulse energy of said consecutive pulses is controlled to stabilize the position of an emission center of the plasma (15).
Inventors:
Plummer Ralph
Konraz Ralph
Bergmann Claus
Cupper Felix
Yonkers Yerun
Konraz Ralph
Bergmann Claus
Cupper Felix
Yonkers Yerun
Application Number:
JP2014524281A
Publication Date:
August 31, 2016
Filing Date:
June 12, 2012
Export Citation:
Assignee:
Ushio, Inc.
Fraunhofer Gesellschaft Tour Velderung der Angewanten Forschung A Fau
Fraunhofer Gesellschaft Tour Velderung der Angewanten Forschung A Fau
International Classes:
H05G2/00; H01L21/027; H05H1/24
Domestic Patent References:
| JP2008270149A |
Foreign References:
| WO2010070540A1 |
Attorney, Agent or Firm:
Fujita Akira
Hideki Imai
Hideki Imai