Title:
真空ゲージの較正パラメータおよび真空ゲージ構造についての測定データを保存するための方法および装置
Document Type and Number:
Japanese Patent JP5124283
Kind Code:
B2
Abstract:
A method and apparatus for measuring gas pressure by combining an ionization gauge with at least one other vacuum sensor. Nonvolatile memory coupled to the vacuum gauge contains calibration parameters unique to each individual sensor based on factory calibration. The nonvolatile memory may contain calibration parameters for a heat-sensitive vacuum sensor to compensate for the temperature gradients generated by the ionization gauge. The calibration parameters are a function of calibration data determined when the ionization gauge is both on and off. The nonvolatile memory may store a window of measurement data of the vacuum gauge that is updated at predetermined time intervals and in response to an event, such as an error event, to aid in investigating the cause of vacuum gauge malfunction or failure.
Inventors:
Arnold Paul Sea
Carmichael Larry K
Rat Paul M
Carmichael Larry K
Rat Paul M
Application Number:
JP2007546716A
Publication Date:
January 23, 2013
Filing Date:
November 29, 2005
Export Citation:
Assignee:
Brooks Automation Incorporated
International Classes:
G01L21/32; G01L21/10
Domestic Patent References:
| JP5215633A | ||||
| JP3197832A | ||||
| JP6066662A | ||||
| JP2002071500A |
Foreign References:
| US4866640 | ||||
| DE19860500A1 |
Attorney, Agent or Firm:
Shuji Sugimoto
Masashi Noda
Kenro Tsutsumi
Masashi Noda
Kenro Tsutsumi