Title:
A method and a device which detect shape change of the substrate which is moving
Document Type and Number:
Japanese Patent JP5906288
Kind Code:
B2
Inventors:
Sean Earl Markham
Application Number:
JP2014162165A
Publication Date:
April 20, 2016
Filing Date:
August 08, 2014
Export Citation:
Assignee:
CORNING INCORPORATED
International Classes:
G01B11/16; C03B17/06; C03B25/12
Domestic Patent References:
| JP2011505559A | ||||
| JP4143608A | ||||
| JP2007298504A | ||||
| JP2008070324A | ||||
| JP2006039725A | ||||
| JP2009503504A |
Foreign References:
| US20070140311 |
Attorney, Agent or Firm:
Yanagita Seiji
Go Sakuma
Go Sakuma
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